From mlacour at stanford.edu Tue Jan 22 12:00:55 2013 From: mlacour at stanford.edu (mlacour at stanford.edu) Date: Tue, 22 Jan 2013 12:00:55 -0800 (PST) Subject: [karlsuss2-pcs] Comment karlsuss2 SNF 2013-01-22 12:00:55: Backside aligning not good Message-ID: <30696876.62.1358884855767.JavaMail.coral@snc-coraldb.stanford.edu> Just to let you know: Backside aligning on KS2 does not give good aligning for me. The image is hard to get in focus but even worse is it that when I put the wafer under the BS microscope it looks expanded and both side cannot be aligned at the same time. Same wafer on KS1 looked totally normal so the expansion is not real. The microscope also gives a blurry picture of the wafer and the right part of the screen is flashing a lot so again the focus is really bad making good aligning hard to obtain. From mahnaz at stanford.edu Tue Jan 22 15:41:18 2013 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Tue, 22 Jan 2013 15:41:18 -0800 Subject: [karlsuss2-pcs] missing the LP 360 filter Message-ID: <50FF239E.7060505@stanford.edu> Who ever has used the filter last, has not put it back. I have a labmember ready to expose and not able to locate the filter. If you have it, bring it back ASAP( i mean now) , this is a community item. mahnaz From audet at stanford.edu Wed Jan 23 17:32:43 2013 From: audet at stanford.edu (audet at stanford.edu) Date: Wed, 23 Jan 2013 17:32:43 -0800 (PST) Subject: [karlsuss2-pcs] Problem karlsuss2 SNF 2013-01-23 17:32:43: backside alignment focus not stable Message-ID: <1612304.102.1358991163999.JavaMail.coral@snc-coraldb.stanford.edu> System not usable for backside alignment, focus is not stable.