From mahnaz at snf.stanford.edu  Mon Nov  3 16:58:12 2003
From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour)
Date: Mon, 03 Nov 2003 16:58:12 -0800
Subject: up date
Message-ID: <3FA6F9A4.A4828107@snf.stanford.edu>


Hello all,

I like to report that Mike and Mario had spend a lot of time on the
track 2  to fix the non uniformity.
I checked the 1 um process and the thickness (1 um) across the wafers is
180A difference. I exposed the wafers on KS2 and 1 Um was resolved with
Vacuum contact and 1.2 second of exposure and of course 60 second of
PEB.
I am in process of checking 220-3 resist on SVG track 2.

PLease report any problems or comments you have  on Coral that will be
very helpful to all of us.

mahnaz