From mahnaz at snf.stanford.edu Tue Nov 2 11:37:39 2004 From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour) Date: Tue, 02 Nov 2004 11:37:39 -0800 Subject: status Message-ID: <4187E203.227D052A@snf.stanford.edu> Hello all, Mike Martinez made some adjustments on the tool and I see a big improvement on the focus. The wafer shift has improved to some extend and the resolution is at top 2.5 um center 1.5 um flat 2.0 um Left 1.5 um Right 1.5 um This is the minimum we are able to resolve. It seems to me that the system drifts so you need to inspect your wafers after exposure and report any issue on coral. mahnaz From djackrel at stanford.edu Fri Nov 5 11:36:05 2004 From: djackrel at stanford.edu (David Bryan Jackrel) Date: Fri, 5 Nov 2004 11:36:05 -0800 (PST) Subject: reservation cancelled today 12-1:30pm Message-ID: Sorry for the late notice. -David //o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o// David Jackrel djackrel at stanford.edu Dept. of Materials Science and Engineering Stanford University ......................................... .Center for Integrated Systems Extension. .420 Via Palou | . .MS 4070 \|/ . .Stanford, CA 94305-4070 ---O--- . .phone: (650)725-7699 /|\ . .fax: (650)723-4659 | . ......................................... From erhan.ata at gmems.com Fri Nov 5 12:26:28 2004 From: erhan.ata at gmems.com (Erhan Ata) Date: Fri, 5 Nov 2004 12:26:28 -0800 (PST) Subject: KS2 free vbetween 13:30-15:30 Message-ID: <20041105202628.85083.qmail@web50201.mail.yahoo.com> Finished early. Erhan ===== From djackrel at stanford.edu Fri Nov 12 13:56:00 2004 From: djackrel at stanford.edu (David Bryan Jackrel) Date: Fri, 12 Nov 2004 13:56:00 -0800 (PST) Subject: KS2 reservation cancelled today 15:30 Message-ID: Sorry for the late notice. //o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o// David Jackrel djackrel at stanford.edu Dept. of Materials Science and Engineering Stanford University ......................................... .Center for Integrated Systems Extension. .420 Via Palou | . .MS 4070 \|/ . .Stanford, CA 94305-4070 ---O--- . .phone: (650)725-7699 /|\ . .fax: (650)723-4659 | . ......................................... From djackrel at stanford.edu Tue Nov 23 12:07:42 2004 From: djackrel at stanford.edu (David Bryan Jackrel) Date: Tue, 23 Nov 2004 12:07:42 -0800 (PST) Subject: KS2 free 13:00-14:00 today Message-ID: Samples not ready. Sorry for the late notice. -David //o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o//o// David Jackrel djackrel at stanford.edu Dept. of Materials Science and Engineering Stanford University ......................................... .Center for Integrated Systems Extension. .420 Via Palou | . .MS 4070 \|/ . .Stanford, CA 94305-4070 ---O--- . .phone: (650)725-7699 /|\ . .fax: (650)723-4659 | . ......................................... From uli at snf.stanford.edu Tue Nov 23 13:23:53 2004 From: uli at snf.stanford.edu (Uli Thumser) Date: Tue, 23 Nov 2004 13:23:53 -0800 Subject: 2 to 4 pm available Message-ID: <41A3AA69.5020605@snf.stanford.edu> From dyeh at snf.stanford.edu Wed Nov 24 13:23:10 2004 From: dyeh at snf.stanford.edu (David Yeh) Date: Wed, 24 Nov 2004 13:23:10 -0800 (PST) Subject: 12:00PM to 3:00PM done early Message-ID: goksen and dyeh's reservations from 12-3PM are done early on karlsuss2. We started early and finished early. It is now free to use. Thanks! David