From mahnaz at snf.stanford.edu  Wed Mar 16 11:44:25 2005
From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour)
Date: Wed, 16 Mar 2005 11:44:25 -0800
Subject: Chuck
Message-ID: <42388C99.8040300@snf.stanford.edu>


Hello all,

I have taken the quartz chuck ( the one without the trenches) to crystal 
shop. Some how the flat on the chuck has disappeared. Tim promised me I 
will get it back this afternoon.
So I have the chuck,  is not missing.

mahnaz


From mahnaz at snf.stanford.edu  Wed Mar 16 13:33:15 2005
From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour)
Date: Wed, 16 Mar 2005 13:33:15 -0800
Subject: Chuck is back
Message-ID: <4238A61B.3080808@snf.stanford.edu>


Please....please if you need to wipe it,   do it GENTLY.

mahnaz


From mahnaz at snf.stanford.edu  Fri Mar 18 13:34:08 2005
From: mahnaz at snf.stanford.edu (Mahnaz Mansourpour)
Date: Fri, 18 Mar 2005 13:34:08 -0800
Subject: Vacuum Sensor error
Message-ID: <423B4950.8040303@snf.stanford.edu>


Hello all,

We have noticed whenever we get the Vacuum sensor error on the system  
we are not able to resolve 3 um and less very well. Here is what I need 
you all to do, when you get the error  even if the system allows you to 
loa d and continue with next exposure to shut the system down during 
Mike and  Mario's hours ( other times yellow light the system with 
vacuum sensor error).
What is happening here is after you get the error the Grab Z needs to be 
adjusted and if not I assure you the center of the wafers  for 3-4 um 
and less will not look pretty.
After the WEC was damaged last year, Karlsuss has worked on the system 
on and off and we are not sure why we are experiencing this problem. I 
will notify karlsuss as well.

mahnaz


From ewilliams at suss.com  Fri Mar 18 13:39:21 2005
From: ewilliams at suss.com (Ed Williams)
Date: Fri, 18 Mar 2005 16:39:21 -0500
Subject: Vacuum Sensor error
Message-ID: <s23b0445.077@mail.SUSS.COM>

Afternoon Mahnaz,

I have asked Scott to reply to your e-mail with what he thinks is causing this issue with the centering. He is out of the office today biut should be back in monday morning.

Take care
Ed

>>> Mahnaz Mansourpour <mahnaz at snf.stanford.edu> 03/18/05 04:34PM >>>

Hello all,

We have noticed whenever we get the Vacuum sensor error on the system  
we are not able to resolve 3 um and less very well. Here is what I need 
you all to do, when you get the error  even if the system allows you to 
loa d and continue with next exposure to shut the system down during 
Mike and  Mario's hours ( other times yellow light the system with 
vacuum sensor error).
What is happening here is after you get the error the Grab Z needs to be 
adjusted and if not I assure you the center of the wafers  for 3-4 um 
and less will not look pretty.
After the WEC was damaged last year, Karlsuss has worked on the system 
on and off and we are not sure why we are experiencing this problem. I 
will notify karlsuss as well.

mahnaz



From zhangy at stanford.edu  Tue Mar 22 09:37:10 2005
From: zhangy at stanford.edu (Yuan Zhang)
Date: Tue, 22 Mar 2005 09:37:10 -0800
Subject: reservation cancelled this morning
Message-ID: <5.2.1.1.2.20050322093518.029d0f60@zhangy.pobox.stanford.edu>

Hi,

I'll cancell my reservation from 10am to 11am this morning. Sorry for the 
late notice.
Thanks.

-Yuan



From colbybellew at yahoo.com  Tue Mar 22 11:44:35 2005
From: colbybellew at yahoo.com (Colby Bellew)
Date: Tue, 22 Mar 2005 11:44:35 -0800 (PST)
Subject: Removed  Res karlsuss2 3/22/05 12:30-13:30
Message-ID: <20050322194435.32312.qmail@web81405.mail.yahoo.com>

wafers not ready