From mahnaz at stanford.edu  Fri Dec  1 15:49:41 2006
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Fri, 01 Dec 2006 15:49:41 -0800
Subject: chuck
Message-ID: <4570BF95.8020908@stanford.edu>

Hello all,

The solid vacuum chuck has been fixed, please give it a try  and see 
how  would  work for you. I have used it without any problem.

mahnaz



From ahazeghi at stanford.edu  Fri Dec  1 17:35:08 2006
From: ahazeghi at stanford.edu (Arash Hazeghi)
Date: Fri, 01 Dec 2006 17:35:08 -0800
Subject: FW: Inconsistent exposure
In-Reply-To: <C19614D9.21AD%ahazeghi@stanford.edu>
Message-ID: <C196184C.21B8%ahazeghi@stanford.edu>


-- 
Arash Hazeghi   

PhD Candidate 
Stanford System for Integrated Systems
CIS-X 300, 420 Via Palou Mall, Stanford, CA 94305
tel:650-725-0418
cell:650-353-1866

https://www.stanford.edu/group/nanoelectronics/index.htm


------ Forwarded Message
From: Arash  Hazeghi <ahazeghi at stanford.edu>
Date: Fri, 01 Dec 2006 17:20:25 -0800
To: <karlsuss at snf.satnford.edu>
Cc: Mahnaz Mansourpour <mahnaz at stanford.edu>
Conversation: Inconsistent exposure
Subject: Inconsistent exposure

Hi,
I exposed a number a wafers (1.7um 3612) resist using Karlsuss (exp. Time
1.6sec) The first wafer that I inspected after development came out OK and I
didn't check the rest, today I noted the 5/7 wafers were exposed improperly
(looks like underexpose finer features did not come out). I wonder what went
wrong?

Thanks,
Arash
-- 
Arash Hazeghi   

PhD Candidate 
Stanford System for Integrated Systems
CIS-X 300, 420 Via Palou Mall, Stanford, CA 94305
tel:650-725-0418
cell:650-353-1866

https://www.stanford.edu/group/nanoelectronics/index.htm




------ End of Forwarded Message




From cm_Richter at att.net  Wed Dec  6 19:55:03 2006
From: cm_Richter at att.net (cm_Richter at att.net)
Date: Thu, 07 Dec 2006 03:55:03 +0000
Subject: Karl Suss: Cancelled Reservation Thursday 12pm-2pm
Message-ID: <120720060355.26220.457790970001DED00000666C21602807489D0A9B080C07ADA1030C@att.net>

I noticed the Karl Suss reservations looked a little tight for tomorrow.