up date

Mahnaz Mansourpour mahnaz at snf.stanford.edu
Tue Jan 3 16:30:56 PST 2006


Hello all,

Happy new year

I tested both system
1 um resist in Hard contact  i was able to resolve  1 um  on top and 
flat , 1.5 um on left and right side but minimum 3.5 was resolved in the 
center  ( ks2).
with the same condition as above  in lowvac  1.5/1.0 um resolved across 
wafer ( ks2).

Ks  with 1.6 um resist in hard contact 1.5 um was resolved across the wafer.

mahnaz



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