From mahnaz at stanford.edu Fri Nov 10 15:57:34 2006 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Fri, 10 Nov 2006 15:57:34 -0800 Subject: up date Message-ID: <455511EE.5070904@stanford.edu> Hello all, As you know, we have been having some over current error with ks1 and usually my experience shows that this error can cause severe problems. I have asked KS to come and do a pm on the ks1 and Mario had noticed that some of the problem might have come from the Z micrometer. I have asked for a quote on that part and asked them to come in when I have the part some times next week. I also have asked them to bring the test mask and test both system for the top to bottom alignment. As soon as I hear from them, I will communicate with you all. Till then, please if you encounter problem with KS with over current or wec error please shut down the system. Secondly, we have managed to get a coated mirror for KS2 that should improve the uniformity of the exposure on KS2. Mario will put in next time when he will do the lamp change. Cheers mahnaz From sarioglu at stanford.edu Tue Nov 21 11:12:53 2006 From: sarioglu at stanford.edu (Fatih Sarioglu) Date: Tue, 21 Nov 2006 11:12:53 -0800 Subject: Karlsuss 2 is free 6PM - 9PM Message-ID: <1164136373.45634fb51ceaa@webmail.stanford.edu> From mahnaz at stanford.edu Tue Nov 28 16:42:48 2006 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Tue, 28 Nov 2006 16:42:48 -0800 Subject: Reservation Canceled Message-ID: <456CD788.6070000@stanford.edu> Hello all, Work on KS1 took much longer so the FSE has to come back tomorrow to work on KS2. He will arrive around 9 am so I am sorry to say that till he finishes all the reservation on karl suss2 are canceled. I am sorry for the inconvenience but the annual pm is worth it. Try ks1 and see it for your self. mahnaz From uyoon at stanford.edu Tue Nov 28 17:18:52 2006 From: uyoon at stanford.edu (Uija Yoon) Date: Tue, 28 Nov 2006 17:18:52 -0800 Subject: Shut down the machine tomorrow-11/29 Message-ID: <001001c71354$55059bc0$0100000a@Mimie> Hi all, Karl-Suss 2 will be shut down tomorrow for a service from 9:00 am to ??????. We will let you know as soon as the machine is up. Karl-Suss 1 is okay to use. Thanks, Uija -------------- next part -------------- An HTML attachment was scrubbed... URL: From mahnaz at stanford.edu Wed Nov 29 16:42:13 2006 From: mahnaz at stanford.edu (Mahnaz Mansourpour) Date: Wed, 29 Nov 2006 16:42:13 -0800 Subject: Up date Message-ID: <456E28E5.4080602@stanford.edu> Hello all, Major pm was done today on the system, the cold mirror on the system was replaced with a new one. The WEC unit was adjusted and microscope Z-axis was rebuild. and whole lot more ... I tested the system with si wafers and 1 um resist the exposure is about 1 to 1.1 second I tested all the tree chucks we have and here you go... With the solid vacuum chuck ( the one without trenches), I was able to resolve 1.5 um in all the area. I think I know what is the issue with this chuck and I will take care of the problem in the next two weeks. With the vacuum chuck, the popular one ( with trenches): In vacuum mode, 1.5 um everywhere and 1 um some area ( I ran quiet few and little confused now). In hard contact mode, 1.5 um resolved all 5 sites. With non vacuum chuck, in vacuum mode 1.5 um resolved nicely every where. One thing I realized during testing is that if before exposure you run the exposure test and let it sit say 20 seconds and then hit exposure it will improve resolution a lot. Let us know if you need help and Mario , Uija and I will show it to you. Let us know if there are any problems and as usual Be kind to the system. mahnaz mahnaz