From mahnaz at stanford.edu  Fri Dec 18 15:28:37 2009
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Fri, 18 Dec 2009 15:28:37 -0800
Subject: pm
Message-ID: <4B2C1025.2000400@stanford.edu>

Hi all,

The annual pm was performed on the tool.
Tested the system in both top side and bottom side , looks good.
1 um 3612 ran with 1.3 seconds of exposure( lamp 5 weeks old, intensity 
was at 13.8 mw/cm2).Normally we need less exposure.
I got the best result in low vacuum. 1 um /1.5 um resolved in 5 points.

Best wishes for holiday and stay safe.

mahnaz