Hi all, The annual pm was performed on the tool. Tested the system in both top side and bottom side , looks good. 1 um 3612 ran with 1.3 seconds of exposure( lamp 5 weeks old, intensity was at 13.8 mw/cm2).Normally we need less exposure. I got the best result in low vacuum. 1 um /1.5 um resolved in 5 points. Best wishes for holiday and stay safe. mahnaz