From mahnaz at stanford.edu  Fri May  8 17:36:51 2009
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Fri, 08 May 2009 17:36:51 -0700
Subject: update
Message-ID: <4A04D023.7050808@stanford.edu>




Hello all,

As you know for the last two days Karlsuss FSE worked on the kS2 . We 
tested the system, pretty much all day today and we can not  get  a 
perfect wafer to my standard.
we know that the WEC is level and the springs that deliver the presser 
have been changed and performing.

We changed the wec presser and few other things but could not get 1.5 um 
resolved across the wafer.
So Gary will leave the system in Yellow. *Please use the system, run a 
test wafer and communicate your result with us.
*
By the way the shift when the wafer and mask went in contact in taken 
care of.

mahnaz



From mahnaz at stanford.edu  Mon May 11 15:42:31 2009
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Mon, 11 May 2009 15:42:31 -0700
Subject: blanket mask
Message-ID: <4A08A9D7.60907@stanford.edu>


Please bring it back, others want to use it too.

mahnaz


From rtomita at stanford.edu  Wed May 13 14:16:19 2009
From: rtomita at stanford.edu (Ryuji Tomita)
Date: Wed, 13 May 2009 14:16:19 -0700 (PDT)
Subject: Karlsuss2 free from 3-5pm
Message-ID: <146389407.3288291242249379425.JavaMail.root@zm07.stanford.edu>

Sample is not ready.
Sorry for short notice.