mahnaz at stanford.edu
Fri May 14 09:40:22 PDT 2010
There is an intermittent alignment issues with both pieces and 4" wafers.
I have send all the complains to Karlsuss and asked for a field service
As I have mentioned last week, they did not get a chance to spend too
much time on the tool because it took too much
time to trouble shoot KS1.
But I like to remind every one that when we tested the system we did not
see the issues but the system was flagged by me in February for the
alignment issue so I am aware of it.
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