From mahnaz at stanford.edu  Mon Mar 28 16:12:19 2011
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Mon, 28 Mar 2011 16:12:19 -0700
Subject: Dirty chucks
Message-ID: <4D9115D3.9070303@stanford.edu>


Hello all,

We have been seeing a lot of contamination left on chucks, this is 
totally unacceptable. the back of your wafers should be clean or
in cane of manual  spinning if need to be use blue dicing tape to keep 
it clean.

We see a lot of resist on the chucks.

mahnaz