Dirty chucks

Mahnaz Mansourpour mahnaz at stanford.edu
Mon Mar 28 16:12:19 PDT 2011


Hello all,

We have been seeing a lot of contamination left on chucks, this is 
totally unacceptable. the back of your wafers should be clean or
in cane of manual  spinning if need to be use blue dicing tape to keep 
it clean.

We see a lot of resist on the chucks.

mahnaz



More information about the karlsuss2 mailing list