From mahnaz at stanford.edu  Wed Apr  4 09:28:01 2012
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Wed, 04 Apr 2012 09:28:01 -0700
Subject: Alignment shift, please read
Message-ID: <4F7C7691.3040300@stanford.edu>

Hello all,

There were  few complains from last year that few labmembers had  noted 
that they have seen misalignment while exposing multilayer.

I have tested the system and do not see the misalignment.
I have checked with few experienced labmembers whom use the system 
regularly and they  do not see the misalignment either.

Please read the attachment and do not shy away from asking Uli and I  to 
go over it with you.

I will add this to the procedure so there is always a copy in the lab 
next to the tool.

mahnaz



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From dinh at kaiamcorp.com  Wed Apr  4 09:29:58 2012
From: dinh at kaiamcorp.com (Dinh Ton)
Date: Wed, 4 Apr 2012 09:29:58 -0700
Subject: Alignment shift, please read
In-Reply-To: <4F7C7691.3040300@stanford.edu>
References: <4F7C7691.3040300@stanford.edu>
Message-ID: <CAL0T8ySFGyqEavs8tQ6C2Qy0SrqmDKnU5ahSAPQnD5FfNYdr6A@mail.gmail.com>

Mahnaz :
I think for Karlsuss2, the misalignment occur during a vacuum contact
alignment.  Other
mode of operation like hard-contact or soft, it's okie.

Dinh

On Wed, Apr 4, 2012 at 9:28 AM, Mahnaz Mansourpour <mahnaz at stanford.edu>wrote:

> Hello all,
>
> There were  few complains from last year that few labmembers had  noted
> that they have seen misalignment while exposing multilayer.
>
> I have tested the system and do not see the misalignment.
> I have checked with few experienced labmembers whom use the system
> regularly and they  do not see the misalignment either.
>
> Please read the attachment and do not shy away from asking Uli and I  to
> go over it with you.
>
> I will add this to the procedure so there is always a copy in the lab next
> to the tool.
>
> mahnaz
>
>
>
>
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