Alignment shift, please read
dinh at kaiamcorp.com
Wed Apr 4 09:29:58 PDT 2012
I think for Karlsuss2, the misalignment occur during a vacuum contact
mode of operation like hard-contact or soft, it's okie.
On Wed, Apr 4, 2012 at 9:28 AM, Mahnaz Mansourpour <mahnaz at stanford.edu>wrote:
> Hello all,
> There were few complains from last year that few labmembers had noted
> that they have seen misalignment while exposing multilayer.
> I have tested the system and do not see the misalignment.
> I have checked with few experienced labmembers whom use the system
> regularly and they do not see the misalignment either.
> Please read the attachment and do not shy away from asking Uli and I to
> go over it with you.
> I will add this to the procedure so there is always a copy in the lab next
> to the tool.
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