Alignment shift, please read

Dinh Ton dinh at
Wed Apr 4 09:29:58 PDT 2012

Mahnaz :
I think for Karlsuss2, the misalignment occur during a vacuum contact
alignment.  Other
mode of operation like hard-contact or soft, it's okie.


On Wed, Apr 4, 2012 at 9:28 AM, Mahnaz Mansourpour <mahnaz at>wrote:

> Hello all,
> There were  few complains from last year that few labmembers had  noted
> that they have seen misalignment while exposing multilayer.
> I have tested the system and do not see the misalignment.
> I have checked with few experienced labmembers whom use the system
> regularly and they  do not see the misalignment either.
> Please read the attachment and do not shy away from asking Uli and I  to
> go over it with you.
> I will add this to the procedure so there is always a copy in the lab next
> to the tool.
> mahnaz
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