From shwong at snf.stanford.edu Fri Jun 1 11:00:34 2007 From: shwong at snf.stanford.edu (shwong at snf.stanford.edu) Date: Fri, 1 Jun 2007 11:00:34 -0700 Subject: Problem ksbonder SNF 2007-06-01 11:00:33: shift of 3 mm seen in one of 4 bonded wafers. Message-ID: The first wafer was perfect, the second showed the largest shift and 3 and 4 were only shifted minorly From gsosa at snf.stanford.edu Fri Jun 1 15:48:41 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 1 Jun 2007 15:48:41 -0700 Subject: Comment ksbonder SNF 2007-06-01 15:48:41: Shifting wafers Message-ID: As per Mario's request, I opened up the chamber to check the center pin. The pin was still extened out at its maximum travel. Depressed the pin in severan times. Pin still moves in and out smoothly. From xzhuan1 at snf.stanford.edu Thu Jun 7 16:01:31 2007 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Thu, 7 Jun 2007 16:01:31 -0700 Subject: Shutdown ksbonder SNF 2007-06-07 16:01:30: cannot load recipe Message-ID: error message shows up when attempting to log in. then the system wouldn't allow me to download recipe. From gsosa at snf.stanford.edu Tue Jun 12 16:48:23 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 12 Jun 2007 16:48:23 -0700 Subject: Comment ksbonder SNF 2007-06-12 16:48:23: Bonder computer update Message-ID: The login database for the bonder apps software is corrupted. Attempted to reload the K/S Bonder software. Unable to load the software due to CD rom problems. THe computer has been removed from the system and will either be repaired or replaced. From emyers at snf.stanford.edu Thu Jun 14 09:55:33 2007 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 14 Jun 2007 09:55:33 -0700 Subject: Comment ksbonder SNF 2007-06-14 09:55:28: Computer update Message-ID: I am still working on setting up the new PC for the K/S bonder. Ihave the operating software loaded and can login to the software. I created a general login. I am currently trying to set up the tool configuration to match the configuration on the old PC. I have both PC's hooked up on the Litho bench in the shop. There may be some additional software that needs to be loaded. I will be off on Thursday and Friday. If this can wait til I return on Monday, I will pick up where I left off. If anyone else works on them while I am gone and want's to install either of these PC's into the bonder to test, please take note: The power supplies on the PC's are set to 115 volt as they are set up at the bench. If they are installed into the bonder, the power supply voltage on the PC's MUST be changed to 230 volts( Small slide switch on power supply) or serious damage to the computer power supplies will result. From emyers at snf.stanford.edu Thu Jun 14 10:01:00 2007 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 14 Jun 2007 10:01:00 -0700 Subject: Problem ksbonder SNF 2007-06-01 11:00:33: shift of 3 mm seen in one of 4 bonded wafers. Message-ID: Removed cleaned and polished center clamp pin. Results are much better, but still getting shift on some wafers. When we opened the system back up, the pin was fine. From emyers at snf.stanford.edu Thu Jun 14 10:02:04 2007 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 14 Jun 2007 10:02:04 -0700 Subject: Comment ksbonder SNF 2007-06-01 15:48:41: Shifting wafers Message-ID: Open system, removed and polished the center pin. Works well most of the time, but seeing shift in some wafers. Reopened the system and the pin was still in correct position. From gsosa at snf.stanford.edu Wed Jun 20 15:50:28 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 20 Jun 2007 15:50:28 -0700 Subject: Comment ksbonder SNF 2007-06-20 15:50:28: KS Bonder Update Message-ID: Unable to get the new computer and the tool to fully comunicate properly. Unknown if it is computer or hardware problem at this point. We are sending the original computer to Karl Suss for evaluation and repair. System is still down