Problem ksbonder SNF 2007-06-01 11:00:33: shift of 3 mm seen in one of 4 bonded wafers.

emyers at snf.stanford.edu emyers at snf.stanford.edu
Thu Jun 14 10:01:00 PDT 2007


Removed cleaned and polished center clamp pin.  Results are much better, but still getting shift on some wafers.  When we opened the system back up, the pin was fine.




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