Problem ksbonder SNF 2009-04-30 02:08:06: Wafer Broken

[jrjain at snf.stanford.edu]

Top wafer came out broken after a process.  This process has been done successfully several times in the recent past.  Wafers were positioned correctly, with tabs and rollers extended properly.  A bonding immediately preceding this one was also done successfully (but using a different recipe).
I remove the wafer pieces from the chuck and blew particles off using N2 gun.