Problem ksbonder SNF 2009-04-30 02:08:06: Wafer Broken

jrjain at snf.stanford.edu jrjain at snf.stanford.edu
Thu Apr 30 02:08:07 PDT 2009


Top wafer came out broken after a process.  This process has been done successfully several times in the recent past.  Wafers were positioned correctly, with tabs and rollers extended properly.  A bonding immediately preceding this one was also done successfully (but using a different recipe).
I remove the wafer pieces from the chuck and blew particles off using N2 gun.




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