From mmessana at snf.stanford.edu  Mon May  4 21:29:59 2009
From: mmessana at snf.stanford.edu (mmessana at snf.stanford.edu)
Date: Mon, 4 May 2009 21:29:59 -0700
Subject: Problem ksbonder SNF 2009-05-04 21:29:59: Particles in Chamber
Message-ID: <mailman.39.1356281984.4031.ksbonder-pcs@snf.stanford.edu>

When bonding test wafer a 1/4" long shard of broken wafer landed on top of the bonded wafer pair. Also wafers were easy to split apart and there were noticeable scratches between the wafers from smaller particles.



From kupnik at snf.stanford.edu  Tue May  5 10:09:45 2009
From: kupnik at snf.stanford.edu (kupnik at snf.stanford.edu)
Date: Tue, 5 May 2009 10:09:45 -0700
Subject: Shutdown ksbonder SNF 2009-05-05 10:09:45: tools needs cleaning and maintenance
Message-ID: <mailman.40.1356281984.4031.ksbonder-pcs@snf.stanford.edu>




From emyers at snf.stanford.edu  Tue May 12 08:13:22 2009
From: emyers at snf.stanford.edu (emyers at snf.stanford.edu)
Date: Tue, 12 May 2009 08:13:22 -0700
Subject: Shutdown ksbonder SNF 2009-05-05 10:09:45: tools needs cleaning and maintenance
Message-ID: <mailman.41.1356281984.4031.ksbonder-pcs@snf.stanford.edu>

temporary yellow light to pull data from the system.  Must go back to shutdown



From xzhuan1 at snf.stanford.edu  Tue May 12 09:11:01 2009
From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu)
Date: Tue, 12 May 2009 09:11:01 -0700
Subject: Shutdown ksbonder SNF 2009-05-12 09:11:00: 
Message-ID: <mailman.42.1356281984.4031.ksbonder-pcs@snf.stanford.edu>




From gsosa at snf.stanford.edu  Tue May 12 09:23:06 2009
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Tue, 12 May 2009 09:23:06 -0700
Subject: Comment ksbonder SNF 2009-05-12 09:23:06: Tool Update 5/12/09
Message-ID: <mailman.43.1356281984.4031.ksbonder-pcs@snf.stanford.edu>

Dis-assembled the top section of pressure plate to remove center pin. The ceramic sleeve is siezed in the outer collar. Mario K will have cristal shop rework the ceramic sleeve.