Problem ksbonder SNF 2009-05-04 21:29:59: Particles in Chamber

mmessana at snf.stanford.edu mmessana at snf.stanford.edu
Mon May 4 21:29:59 PDT 2009


When bonding test wafer a 1/4" long shard of broken wafer landed on top of the bonded wafer pair. Also wafers were easy to split apart and there were noticeable scratches between the wafers from smaller particles.




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