From ysohn at snf.stanford.edu Mon Apr 16 22:20:23 2012 From: ysohn at snf.stanford.edu (ysohn at snf.stanford.edu) Date: Mon, 16 Apr 2012 22:20:23 -0700 Subject: Problem ksbonder SNF 2012-04-16 22:20:22: equipment frozen Message-ID: I was running my dummy wafer using standard recipe. This was my first wafer today. Everything looked normal but the machine was stucked at step 22 and couldn't get out of it. I waited for 1 hour but it still stayed in step 22. Try to use all possible buttons in controller (abort, pause, go standby, initialize machine) but nothing worked. In case anyone can get my wafer out, please just put it on the cleanroom wipe around the machine. I left the machine just as it is, and also left it enabled. From mahnaz at snf.stanford.edu Tue Apr 17 11:29:02 2012 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 17 Apr 2012 11:29:02 -0700 Subject: Problem ksbonder SNF 2012-04-16 22:20:22: equipment frozen Message-ID: The syatem was stuck at step 22. Steve and i discussed it and decided to shut down the computer. It worked and the wafer has been unloaded and no apparent damage. Lucky for us this time.