Problem ksbonder SNF 2012-04-16 22:20:22: equipment frozen

mahnaz at mahnaz at
Tue Apr 17 11:29:02 PDT 2012

The syatem was stuck at step 22.
Steve and i discussed it and decided to shut down the computer.
It worked and the wafer has been unloaded and no apparent damage.
Lucky for us this time.

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