From gsosa at snf.stanford.edu Wed Nov 14 07:10:33 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 14 Nov 2007 07:10:33 -0800 Subject: Problem kscoat SNF 2007-10-11 16:20:56: Robot not detecting wafers Message-ID: Turned off a vacuum solinoid to the developer module that was on all the time. Tested robot vacuum sensing and system operation. All OK. From gsosa at snf.stanford.edu Wed Nov 14 07:11:41 2007 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 14 Nov 2007 07:11:41 -0800 Subject: Shutdown kscoat SNF 2007-06-13 09:27:36: To be installed... Message-ID: Tool install completed. From michael.robles at asml.com Wed Nov 14 08:19:13 2007 From: michael.robles at asml.com (Michael Robles) Date: Wed, 14 Nov 2007 11:19:13 -0500 Subject: Shutdown kscoat SNF 2007-06-13 09:27:36: To be installed... In-Reply-To: <20071114151141.AE83F4C5CD@smtp3.stanford.edu> Message-ID: <56527707A65E3F46B076EE8AC8663A8386BCC5@USWILX85.sn-us.asml.com> Encountered robot movement error. Receive a "Z axis movement error" when coating more than two wafers at a time. Investigating with Suss and with robot vendor. -----Original Message----- From: gsosa at snf.stanford.edu [mailto:gsosa at snf.stanford.edu] Sent: Wednesday, November 14, 2007 07:12 To: kscoat-pcs at snf.stanford.edu Subject: Re: Shutdown kscoat SNF 2007-06-13 09:27:36: To be installed... Tool install completed. -- The information contained in this communication and any attachments is confidential and may be privileged, and is for the sole use of the intended recipient(s). Any unauthorized review, use, disclosure or distribution is prohibited. Unless explicitly stated otherwise in the body of this communication or the attachment thereto (if any), the information is provided on an AS-IS basis without any express or implied warranties or liabilities. To the extent you are relying on this information, you are doing so at your own risk. If you are not the intended recipient, please notify the sender immediately by replying to this message and destroy all copies of this message and any attachments. ASML is neither liable for the proper and complete transmission of the information contained in this communication, nor for any delay in its receipt. From mrobles at snf.stanford.edu Wed Nov 21 10:04:12 2007 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Wed, 21 Nov 2007 10:04:12 -0800 Subject: Shutdown kscoat SNF 2007-11-21 10:04:11: Robot movement errors. Message-ID: Robot errors out during normal movements. Robot not moving normally. Tool is down.