From mrobles at snf.stanford.edu  Fri Aug  1 09:27:17 2008
From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu)
Date: Fri, 1 Aug 2008 09:27:17 -0700
Subject: Shutdown kscoat SNF 2008-08-01 09:27:16: Down for maintenance training.
Message-ID: <mailman.47.1356281990.4047.kscoat-pcs@snf.stanford.edu>

Tool down for maintenance training.



From lindaohara at snf.stanford.edu  Thu Aug 14 07:27:57 2008
From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu)
Date: Thu, 14 Aug 2008 07:27:57 -0700
Subject: Problem kscoat SNF 2008-08-14 07:27:53: System not Initializing
Message-ID: <mailman.48.1356281990.4047.kscoat-pcs@snf.stanford.edu>

System not initializing after exhaust work 8/13



From lindaohara at snf.stanford.edu  Fri Aug 15 13:48:14 2008
From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu)
Date: Fri, 15 Aug 2008 13:48:14 -0700
Subject: Comment kscoat SNF 2008-08-15 13:48:13: Cleaned Spin Coater
Message-ID: <mailman.49.1356281990.4047.kscoat-pcs@snf.stanford.edu>

Manual Cleaned Spin Coater



From gsosa at snf.stanford.edu  Fri Aug 29 11:40:20 2008
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Fri, 29 Aug 2008 11:40:20 -0700
Subject: Problem kscoat SNF 2008-08-29 11:40:20: Developer issues
Message-ID: <mailman.50.1356281990.4047.kscoat-pcs@snf.stanford.edu>

The standard developer program is not working correctly. Recipe may be corrupted. Also backs of wafers are still wet.