From mrobles at snf.stanford.edu Wed Jul 2 10:44:21 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Wed, 2 Jul 2008 10:44:21 -0700 Subject: Comment kscoat SNF 2008-07-02 10:44:21: PM Message-ID: From mrobles at snf.stanford.edu Wed Jul 2 10:44:37 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Wed, 2 Jul 2008 10:44:37 -0700 Subject: Shutdown kscoat SNF 2008-07-02 10:44:37: PM Message-ID: Will take 1-2 days. From mahnaz at snf.stanford.edu Wed Jul 2 11:35:44 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 2 Jul 2008 11:35:44 -0700 Subject: Comment kscoat SNF 2008-07-02 11:35:44: ran 955 i line Message-ID: readings for .7 um 7113, 7101, 7110,7105,7113 EBR little rough other wise perfect. From mahnaz at snf.stanford.edu Wed Jul 2 12:43:49 2008 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Wed, 2 Jul 2008 12:43:49 -0700 Subject: Comment kscoat SNF 2008-07-02 11:35:44: ran 955 i line Message-ID: meant for svg track. From mrobles at snf.stanford.edu Thu Jul 3 12:03:35 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Thu, 3 Jul 2008 12:03:35 -0700 Subject: Comment kscoat SNF 2008-07-03 12:03:34: Tool cleaned Message-ID: Cleaned developer bowl, coater bowl, robot, centering station, hot/chill plates, filled HMDS. From mrobles at snf.stanford.edu Thu Jul 3 12:03:57 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Thu, 3 Jul 2008 12:03:57 -0700 Subject: Shutdown kscoat SNF 2008-07-02 10:44:37: PM Message-ID: PM completed. See comment. From mrobles at snf.stanford.edu Thu Jul 10 10:51:49 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Thu, 10 Jul 2008 10:51:49 -0700 Subject: Problem kscoat SNF 2008-07-10 10:51:48: Odor still present. Message-ID: With the wall built there is still a strong air current around the tool. The current is less but the odor is still strong after time. From mrobles at snf.stanford.edu Fri Jul 11 14:04:49 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Fri, 11 Jul 2008 14:04:49 -0700 Subject: Problem kscoat SNF 2008-07-11 14:04:45: Smell still present. Message-ID: Smell still present. From mrobles at snf.stanford.edu Fri Jul 11 14:05:11 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Fri, 11 Jul 2008 14:05:11 -0700 Subject: Shutdown kscoat SNF 2008-07-11 14:05:11: Smell. Message-ID: Safety concern. From mrobles at snf.stanford.edu Tue Jul 15 13:24:11 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Tue, 15 Jul 2008 13:24:11 -0700 Subject: Comment kscoat SNF 2008-05-23 08:35:03: Training. Message-ID: From mrobles at snf.stanford.edu Tue Jul 15 13:24:26 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Tue, 15 Jul 2008 13:24:26 -0700 Subject: Comment kscoat SNF 2008-05-21 11:17:12: Arm is OK Message-ID: All calibration ok. From mrobles at snf.stanford.edu Tue Jul 15 13:24:42 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Tue, 15 Jul 2008 13:24:42 -0700 Subject: Comment kscoat SNF 2008-06-10 14:26:32: Cleaned Coater bowl. Message-ID: From mrobles at snf.stanford.edu Tue Jul 15 13:24:47 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Tue, 15 Jul 2008 13:24:47 -0700 Subject: Comment kscoat SNF 2008-07-02 10:44:21: PM Message-ID: From mrobles at snf.stanford.edu Tue Jul 15 13:24:51 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Tue, 15 Jul 2008 13:24:51 -0700 Subject: Comment kscoat SNF 2008-07-03 12:03:34: Tool cleaned Message-ID: From mrobles at snf.stanford.edu Tue Jul 15 13:24:57 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Tue, 15 Jul 2008 13:24:57 -0700 Subject: Comment kscoat SNF 2008-06-18 09:34:33: Waste can emptied. Message-ID: From mrobles at snf.stanford.edu Wed Jul 16 10:21:01 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Wed, 16 Jul 2008 10:21:01 -0700 Subject: Comment kscoat SNF 2008-07-16 10:21:01: Shutdown for service. Message-ID: Replacing sensor for lid. From gsosa at snf.stanford.edu Wed Jul 16 15:38:13 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 16 Jul 2008 15:38:13 -0700 Subject: Comment kscoat SNF 2008-07-16 15:38:13: Sensor replaced Message-ID: THe lid down position sensor has been replaced and adjusted. The lid now senses the down position correctly. From mrobles at snf.stanford.edu Tue Jul 22 15:07:31 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Tue, 22 Jul 2008 15:07:31 -0700 Subject: Comment kscoat SNF 2008-07-22 15:07:30: Removed lid. Message-ID: Removing the lid didn't help the exhaust issue at all. Will be replaced July 23rd. From mrobles at snf.stanford.edu Tue Jul 22 15:08:09 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Tue, 22 Jul 2008 15:08:09 -0700 Subject: Problem kscoat SNF 2008-07-22 15:08:05: Resist bottle empty. Message-ID: Ran out of resist. Bubbles in the line. Expect new bottle of resist July 23rd. From gsosa at snf.stanford.edu Wed Jul 23 16:03:34 2008 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 23 Jul 2008 16:03:34 -0700 Subject: Comment kscoat SNF 2008-07-23 16:03:34: Tool update 07/23/08 Message-ID: Re-installed the plastic cover over the tool. Also did some re-configuring of the exhaust system within the coater module. The 2 1/1/2 inch exhaust ducts from coater bowl tie into a common manifold. Split off 1 exhaust duct and tied it int an unused port. The exhaust at the coater bowl befor the change was 320 FPM. Exhaust after the change is 540 FPM. Will run tests tomorrow with ASML to see if conditions improve.. From mrobles at snf.stanford.edu Fri Jul 25 13:59:42 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Fri, 25 Jul 2008 13:59:42 -0700 Subject: Comment kscoat SNF 2008-07-25 13:59:42: Exhaust update 7/25/08 Message-ID: After Gary's reconfiguration the smell is better. It is not good enough for heavy use yet. From mrobles at snf.stanford.edu Fri Jul 25 14:00:06 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Fri, 25 Jul 2008 14:00:06 -0700 Subject: Problem kscoat SNF 2008-07-22 15:08:05: Resist bottle empty. Message-ID: Installed new bottle and purged line of bubbles. From mrobles at snf.stanford.edu Fri Jul 25 14:02:20 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Fri, 25 Jul 2008 14:02:20 -0700 Subject: Comment kscoat SNF 2008-07-25 14:02:20: Cleaned hot plates, robot, and coater pins. Message-ID: Noticed contamination on the back of a wafer after coating. Cleaned both hot plates, chill plate, robot end effector, and coater pins. Ran three wafers through and the backsides were clean. From mrobles at snf.stanford.edu Fri Jul 25 14:06:08 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Fri, 25 Jul 2008 14:06:08 -0700 Subject: Problem kscoat SNF 2008-07-25 14:06:07: Resist not completely covering wafer during coating. Message-ID: After exhaust reconfiguration the amount of dispensed resist is not sufficient to coat a 4" wafer. Tested three coated wafers and the uniformity was fine, less than +- 25 Angstroms on all three wafers. Will not make any adjustments in amount dispensed until final exhaust configuration. From mrobles at snf.stanford.edu Thu Jul 31 13:35:14 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Thu, 31 Jul 2008 13:35:14 -0700 Subject: Comment kscoat SNF 2008-07-16 10:21:01: Shutdown for service. Message-ID: Seneor replaced. Lid operational. From mrobles at snf.stanford.edu Thu Jul 31 13:35:50 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Thu, 31 Jul 2008 13:35:50 -0700 Subject: Comment kscoat SNF 2008-07-22 15:07:30: Removed lid. Message-ID: Smell much worse. Replaced lid before running the tool again.