Comment kscoat SNF 2008-07-23 16:03:34: Tool update 07/23/08

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Jul 23 16:03:34 PDT 2008


Re-installed the plastic cover over the tool. Also did some re-configuring of the exhaust system within the coater module. The 2 1/1/2 inch exhaust ducts from coater bowl tie into a common manifold. Split  off 1 exhaust duct and tied it int an unused port. The exhaust at the coater bowl befor the change was 320 FPM. Exhaust after the change is 540 FPM. Will run tests tomorrow with ASML to see if conditions improve..




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