Comment kscoat SNF 2008-07-25 14:02:20: Cleaned hot plates, robot, and coater pins.

mrobles at snf.stanford.edu mrobles at snf.stanford.edu
Fri Jul 25 14:02:20 PDT 2008


Noticed contamination on the back of a wafer after coating.  Cleaned both hot plates, chill plate, robot end effector, and coater pins.
Ran three wafers through and the backsides were clean.




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