Problem kscoat SNF 2008-07-25 14:06:07: Resist not completely covering wafer during coating.

mrobles at snf.stanford.edu mrobles at snf.stanford.edu
Fri Jul 25 14:06:08 PDT 2008


After exhaust reconfiguration the amount of dispensed resist is not sufficient to coat a 4" wafer.  Tested three coated wafers and the uniformity was fine, less than +- 25 Angstroms on all three wafers.
Will not make any adjustments in amount dispensed until final exhaust configuration.




More information about the kscoat-pcs mailing list