From mrobles at snf.stanford.edu  Thu Jun  5 09:16:52 2008
From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu)
Date: Thu, 5 Jun 2008 09:16:52 -0700
Subject: Problem kscoat SNF 2008-06-05 09:16:52: Coating wafers and can smell resist.
Message-ID: <mailman.17.1356281989.4047.kscoat-pcs@snf.stanford.edu>

Coating 8" wafers and smell is strong in litho room.



From mrobles at snf.stanford.edu  Thu Jun  5 09:18:59 2008
From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu)
Date: Thu, 5 Jun 2008 09:18:59 -0700
Subject: Problem kscoat SNF 2008-05-30 16:09:14: Issues with 6" and 8" handling.  4" seems fine
Message-ID: <mailman.18.1356281989.4047.kscoat-pcs@snf.stanford.edu>

Vendor came and re-calibrated the handling.  No problem with 8" casettes, some 6" cassettes may have loading/unloading problems.
Good/ bad 6" cassettes will be identified.



From mrobles at snf.stanford.edu  Tue Jun 10 14:26:33 2008
From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu)
Date: Tue, 10 Jun 2008 14:26:33 -0700
Subject: Comment kscoat SNF 2008-06-10 14:26:32: Cleaned Coater bowl.
Message-ID: <mailman.19.1356281990.4047.kscoat-pcs@snf.stanford.edu>

Bowl soaked and everything scrubbed clean.



From mrobles at snf.stanford.edu  Wed Jun 18 09:34:33 2008
From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu)
Date: Wed, 18 Jun 2008 09:34:33 -0700
Subject: Comment kscoat SNF 2008-06-18 09:34:33: Waste can emptied.
Message-ID: <mailman.20.1356281990.4047.kscoat-pcs@snf.stanford.edu>

Waste can emptied.