From mahnaz at snf.stanford.edu  Tue May 20 09:36:57 2008
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Tue, 20 May 2008 09:36:57 -0700
Subject: Problem kscoat SNF 2008-05-20 09:36:56: smells
Message-ID: <mailman.10.1356281989.4047.kscoat-pcs@snf.stanford.edu>

We ran one wafer and we could smell it all the way to YES oven.



From mahnaz at snf.stanford.edu  Wed May 21 10:34:48 2008
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Wed, 21 May 2008 10:34:48 -0700
Subject: Shutdown kscoat SNF 2008-05-21 10:34:47: arm lost caliberation
Message-ID: <mailman.11.1356281989.4047.kscoat-pcs@snf.stanford.edu>

Binder and I were running quartz wafers , arm came out too far and broke a wfafer and went to shut down mode. 
Mike is working on the system already.



From mrobles at snf.stanford.edu  Wed May 21 11:17:13 2008
From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu)
Date: Wed, 21 May 2008 11:17:13 -0700
Subject: Comment kscoat SNF 2008-05-21 11:17:12: Arm is OK
Message-ID: <mailman.12.1356281989.4047.kscoat-pcs@snf.stanford.edu>

Ran test wafers using arm manually and found no problems.  Coated two batches of wafers (three and two) with no problems.  Will watch for abnonrmal arm movement.



From mrobles at snf.stanford.edu  Wed May 21 11:18:04 2008
From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu)
Date: Wed, 21 May 2008 11:18:04 -0700
Subject: Shutdown kscoat SNF 2008-05-21 10:34:47: arm lost caliberation
Message-ID: <mailman.13.1356281989.4047.kscoat-pcs@snf.stanford.edu>

Manually tested and everything seems to be OK.  Coated two batches of wafers and no problems were found.  Will watch in the future.



From mrobles at snf.stanford.edu  Fri May 23 08:35:03 2008
From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu)
Date: Fri, 23 May 2008 08:35:03 -0700
Subject: Comment kscoat SNF 2008-05-23 08:35:03: Training.
Message-ID: <mailman.14.1356281989.4047.kscoat-pcs@snf.stanford.edu>

Training Mahnaz, Gary \, and Mario on track maintenance and operation.  Will be cycling power as part of the training.



From mrobles at snf.stanford.edu  Fri May 30 16:07:57 2008
From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu)
Date: Fri, 30 May 2008 16:07:57 -0700
Subject: Problem kscoat SNF 2008-05-30 16:07:56: Spin Coater waste can problem
Message-ID: <mailman.15.1356281989.4047.kscoat-pcs@snf.stanford.edu>

Waste can in spin coater is not communicating with Suss software.  In order to run the coater the waste module must be set offline.



From mrobles at snf.stanford.edu  Fri May 30 16:09:15 2008
From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu)
Date: Fri, 30 May 2008 16:09:15 -0700
Subject: Problem kscoat SNF 2008-05-30 16:09:14: Issues with 6" and 8" handling.  4" seems fine
Message-ID: <mailman.16.1356281989.4047.kscoat-pcs@snf.stanford.edu>

6" and 8" handling is not currently up for users.  4" seems fine.  Vender has been contacted.