Comment kscoat SNF 2008-05-21 11:17:12: Arm is OK
mrobles at snf.stanford.edu
mrobles at snf.stanford.edu
Wed May 21 11:17:13 PDT 2008
Ran test wafers using arm manually and found no problems. Coated two batches of wafers (three and two) with no problems. Will watch for abnonrmal arm movement.
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