From mahnaz at snf.stanford.edu  Wed Oct  1 09:15:29 2008
From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu)
Date: Wed, 1 Oct 2008 09:15:29 -0700
Subject: Problem kscoat SNF 2008-10-01 09:15:29: smell the resist while spinning
Message-ID: <mailman.67.1356281990.4047.kscoat-pcs@snf.stanford.edu>




From mrobles at snf.stanford.edu  Fri Oct 17 10:43:49 2008
From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu)
Date: Fri, 17 Oct 2008 10:43:49 -0700
Subject: Comment kscoat SNF 2008-10-17 10:43:48: Scale functional and calibrated.
Message-ID: <mailman.68.1356281990.4047.kscoat-pcs@snf.stanford.edu>

The waste scale is functional and calibrated.  It has been turned back on.  The current weight of the scale is illustrated in the Spin Coater icon on the main screen.  If the waste scale reaches 5kg (this is nowhere near the overflow level) the track will not operate until the waste is emptied.
To have the waste emptied contact Gary or Mike.



From mrobles at snf.stanford.edu  Thu Oct 23 11:47:21 2008
From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu)
Date: Thu, 23 Oct 2008 11:47:21 -0700
Subject: Problem kscoat SNF 2008-10-23 11:47:20: Backside wetting on developer.
Message-ID: <mailman.69.1356281990.4047.kscoat-pcs@snf.stanford.edu>

Intermittent backside wetting on wafers after developer.  Looking into it.