From mrobles at snf.stanford.edu Thu Sep 4 14:44:06 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Thu, 4 Sep 2008 14:44:06 -0700 Subject: Shutdown kscoat SNF 2008-08-01 09:27:16: Down for maintenance training. Message-ID: UP. From mrobles at snf.stanford.edu Thu Sep 4 14:44:32 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Thu, 4 Sep 2008 14:44:32 -0700 Subject: Shutdown kscoat SNF 2008-07-11 14:05:11: Smell. Message-ID: Smell not noticible when coating wafers. From mrobles at snf.stanford.edu Thu Sep 4 14:45:11 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Thu, 4 Sep 2008 14:45:11 -0700 Subject: Problem kscoat SNF 2008-08-14 07:27:53: System not Initializing Message-ID: System OK. From mrobles at snf.stanford.edu Thu Sep 4 14:46:14 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Thu, 4 Sep 2008 14:46:14 -0700 Subject: Problem kscoat SNF 2008-07-11 14:04:45: Smell still present. Message-ID: Smell gone. From mrobles at snf.stanford.edu Thu Sep 4 14:46:25 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Thu, 4 Sep 2008 14:46:25 -0700 Subject: Problem kscoat SNF 2008-07-10 10:51:48: Odor still present. Message-ID: Odor gone. From mrobles at snf.stanford.edu Thu Sep 4 14:48:30 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Thu, 4 Sep 2008 14:48:30 -0700 Subject: Problem kscoat SNF 2008-08-29 11:40:20: Developer issues Message-ID: Developer working properly. E0 on stepper using Suss track is the same as on the SVG track. From johana at snf.stanford.edu Wed Sep 10 18:17:33 2008 From: johana at snf.stanford.edu (johana at snf.stanford.edu) Date: Wed, 10 Sep 2008 18:17:33 -0700 Subject: Problem kscoat SNF 2008-09-10 18:17:32: Broken wafer on cold plate Message-ID: I got an error message saying that the wafer could not be found on the cold plate. I was running my usual BARC program and the wafer had passed hot plate 1 at 200 C, so after talking to Mahnaz, I opened the cold plate from behind, as shown for the cleaning procedure. I found my quartz wafer broken into three large pieces and 2 tiny grains. I took them out and cleaned the plate with acetone and IPA before putting everything back. I ran a test wafer and everything now seems fine. --Johan From michael.robles at asml.com Fri Sep 19 09:31:49 2008 From: michael.robles at asml.com (Michael Robles) Date: Fri, 19 Sep 2008 12:31:49 -0400 Subject: A reminder to all Karl Suss coater/developer users. Message-ID: <56527707A65E3F46B076EE8AC8663A83B5F6F4@USWILX85.sn-us.asml.com> After an incident yesterday I feel the need to remind everyone... I realize that you may be in a hurry to get your coated or developed wafers. But one of the worst things you can do to the software is to remove your cassette before all of your scheduled wafers are returned. If you do this wafers can get lost, pins can be in the wrong position, and just general annoyance. It can take a long time to recover from this. Wait until the report screen comes up before you remove your cassette. Thank you, Michael -- The information contained in this communication and any attachments is confidential and may be privileged, and is for the sole use of the intended recipient(s). Any unauthorized review, use, disclosure or distribution is prohibited. Unless explicitly stated otherwise in the body of this communication or the attachment thereto (if any), the information is provided on an AS-IS basis without any express or implied warranties or liabilities. To the extent you are relying on this information, you are doing so at your own risk. If you are not the intended recipient, please notify the sender immediately by replying to this message and destroy all copies of this message and any attachments. ASML is neither liable for the proper and complete transmission of the information contained in this communication, nor for any delay in its receipt. -------------- next part -------------- An HTML attachment was scrubbed... URL: From michael.robles at asml.com Mon Sep 22 15:57:23 2008 From: michael.robles at asml.com (Michael Robles) Date: Mon, 22 Sep 2008 18:57:23 -0400 Subject: FW: DI Water Shutdown, Wed. AM Message-ID: <56527707A65E3F46B076EE8AC8663A83B5F701@USWILX85.sn-us.asml.com> All, Without DI, the developer will be down but the coater will still be up. Thanks, Michael -----Original Message----- From: Mary Tang [mailto:mtang at stanford.edu] Sent: Monday, September 22, 2008 15:53 To: labmembers at snf.stanford.edu Subject: DI Water Shutdown, Wed. AM Dear Labmembers -- The DI water pump which supplies our lab will be replaced on Wednesday morning, starting at 7 am and should be done by noon, if not before then. During this time, DI water will unavailable. This affects the following stations: Wet stations: wbdiff, wbsilicide, wbnonmetal, wbnitride, wbgeneral, wbgen2, wbmiscres, wbgaas, wbmetal Other stations: svgdev, svgdev2, kscoat, wafersaw, cmp These tools have been reserved for this time and will be unavailable. Please plan your processing around this shutdown. We apologize for the inconvenience - but this should give us a more reliable and serviceable DI supply. Thanks for your attention -- You SNF Staff -- The information contained in this communication and any attachments is confidential and may be privileged, and is for the sole use of the intended recipient(s). Any unauthorized review, use, disclosure or distribution is prohibited. Unless explicitly stated otherwise in the body of this communication or the attachment thereto (if any), the information is provided on an AS-IS basis without any express or implied warranties or liabilities. To the extent you are relying on this information, you are doing so at your own risk. If you are not the intended recipient, please notify the sender immediately by replying to this message and destroy all copies of this message and any attachments. ASML is neither liable for the proper and complete transmission of the information contained in this communication, nor for any delay in its receipt. From mrobles at snf.stanford.edu Fri Sep 26 14:27:58 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Fri, 26 Sep 2008 14:27:58 -0700 Subject: Problem kscoat SNF 2008-09-10 18:17:32: Broken wafer on cold plate Message-ID: Cleared by user. From mrobles at snf.stanford.edu Fri Sep 26 14:28:49 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Fri, 26 Sep 2008 14:28:49 -0700 Subject: Problem kscoat SNF 2008-07-25 14:06:07: Resist not completely covering wafer during coating. Message-ID: Increased dispense amount and wafers are fully covered. From mrobles at snf.stanford.edu Fri Sep 26 14:30:05 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Fri, 26 Sep 2008 14:30:05 -0700 Subject: Comment kscoat SNF 2008-09-26 14:30:04: Cleaned spinner, hot, chill plates. Message-ID: Cleaned spin bowl, hot, and chill plates. Plates had minimal dirt, spin bowl was very dirty. It has not been cleaned for ~3 weeks. From mrobles at snf.stanford.edu Fri Sep 26 14:31:39 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Fri, 26 Sep 2008 14:31:39 -0700 Subject: Comment kscoat SNF 2008-07-16 15:38:13: Sensor replaced Message-ID: From mrobles at snf.stanford.edu Fri Sep 26 14:31:48 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Fri, 26 Sep 2008 14:31:48 -0700 Subject: Comment kscoat SNF 2008-07-23 16:03:34: Tool update 07/23/08 Message-ID: From mrobles at snf.stanford.edu Fri Sep 26 14:31:56 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Fri, 26 Sep 2008 14:31:56 -0700 Subject: Comment kscoat SNF 2008-07-25 13:59:42: Exhaust update 7/25/08 Message-ID: From mrobles at snf.stanford.edu Fri Sep 26 14:32:05 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Fri, 26 Sep 2008 14:32:05 -0700 Subject: Comment kscoat SNF 2008-07-25 14:02:20: Cleaned hot plates, robot, and coater pins. Message-ID: From mrobles at snf.stanford.edu Fri Sep 26 14:32:15 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Fri, 26 Sep 2008 14:32:15 -0700 Subject: Comment kscoat SNF 2008-08-15 13:48:13: Cleaned Spin Coater Message-ID: From mrobles at snf.stanford.edu Fri Sep 26 14:32:24 2008 From: mrobles at snf.stanford.edu (mrobles at snf.stanford.edu) Date: Fri, 26 Sep 2008 14:32:24 -0700 Subject: Comment kscoat SNF 2008-09-26 14:30:04: Cleaned spinner, hot, chill plates. Message-ID: