FW: DI Water Shutdown, Wed. AM
michael.robles at asml.com
Mon Sep 22 15:57:23 PDT 2008
Without DI, the developer will be down but the coater will still be up.
From: Mary Tang [mailto:mtang at stanford.edu]
Sent: Monday, September 22, 2008 15:53
To: labmembers at snf.stanford.edu
Subject: DI Water Shutdown, Wed. AM
Dear Labmembers --
The DI water pump which supplies our lab will be replaced on Wednesday
morning, starting at 7 am and should be done by noon, if not before
then. During this time, DI water will unavailable. This affects the
Wet stations: wbdiff, wbsilicide, wbnonmetal, wbnitride, wbgeneral,
wbgen2, wbmiscres, wbgaas, wbmetal
Other stations: svgdev, svgdev2, kscoat, wafersaw, cmp
These tools have been reserved for this time and will be unavailable.
Please plan your processing around this shutdown. We apologize for the
inconvenience - but this should give us a more reliable and serviceable
Thanks for your attention --
You SNF Staff
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