September 2008 Archives by subject

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Starting: Thu Sep 4 14:44:06 PDT 2008
Ending: Fri Sep 26 14:32:24 PDT 2008
Messages: 18

• A reminder to all Karl Suss coater/developer users.   Michael Robles
• Comment kscoat SNF 2008-07-16 15:38:13: Sensor replaced   mrobles at snf.stanford.edu
• Comment kscoat SNF 2008-07-23 16:03:34: Tool update 07/23/08   mrobles at snf.stanford.edu
• Comment kscoat SNF 2008-07-25 13:59:42: Exhaust update 7/25/08   mrobles at snf.stanford.edu
• Comment kscoat SNF 2008-07-25 14:02:20: Cleaned hot plates, robot, and coater pins.   mrobles at snf.stanford.edu
• Comment kscoat SNF 2008-08-15 13:48:13: Cleaned Spin Coater   mrobles at snf.stanford.edu
• Comment kscoat SNF 2008-09-26 14:30:04: Cleaned spinner, hot, chill plates.   mrobles at snf.stanford.edu
• Comment kscoat SNF 2008-09-26 14:30:04: Cleaned spinner, hot, chill plates.   mrobles at snf.stanford.edu
• FW: DI Water Shutdown, Wed. AM   Michael Robles
• Problem kscoat SNF 2008-07-10 10:51:48: Odor still present.   mrobles at snf.stanford.edu
• Problem kscoat SNF 2008-07-11 14:04:45: Smell still present.   mrobles at snf.stanford.edu
• Problem kscoat SNF 2008-07-25 14:06:07: Resist not completely covering wafer during coating.   mrobles at snf.stanford.edu
• Problem kscoat SNF 2008-08-14 07:27:53: System not Initializing   mrobles at snf.stanford.edu
• Problem kscoat SNF 2008-08-29 11:40:20: Developer issues   mrobles at snf.stanford.edu
• Problem kscoat SNF 2008-09-10 18:17:32: Broken wafer on cold plate   johana at snf.stanford.edu
• Problem kscoat SNF 2008-09-10 18:17:32: Broken wafer on cold plate   mrobles at snf.stanford.edu
• Shutdown kscoat SNF 2008-07-11 14:05:11: Smell.   mrobles at snf.stanford.edu
• Shutdown kscoat SNF 2008-08-01 09:27:16: Down for maintenance training.   mrobles at snf.stanford.edu

Last message date: Fri Sep 26 14:32:24 PDT 2008
Archived on: Sun Dec 23 08:59:54 PST 2012

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