From lindaohara at snf.stanford.edu  Fri Apr  3 15:31:54 2009
From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu)
Date: Fri, 3 Apr 2009 15:31:54 -0700
Subject: Comment kscoat SNF 2009-04-03 15:31:54: Cleaned KS 
Message-ID: <mailman.87.1356281990.4047.kscoat-pcs@snf.stanford.edu>




From lindaohara at snf.stanford.edu  Fri Apr 10 15:52:44 2009
From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu)
Date: Fri, 10 Apr 2009 15:52:44 -0700
Subject: Problem kscoat SNF 2009-03-12 15:00:28: EBR leak
Message-ID: <mailman.88.1356281990.4047.kscoat-pcs@snf.stanford.edu>

Leak resolved by Mario and Gary. Mario re-aligned the clean nozzle. The cover was put on by Mario and Gary. Dispense arm is okay now.



From lindaohara at snf.stanford.edu  Fri Apr 10 15:53:10 2009
From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu)
Date: Fri, 10 Apr 2009 15:53:10 -0700
Subject: Comment kscoat SNF 2009-04-10 15:53:09: Cleaned KS & Bake Plates
Message-ID: <mailman.89.1356281990.4047.kscoat-pcs@snf.stanford.edu>




From lindaohara at snf.stanford.edu  Thu Apr 16 12:50:50 2009
From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu)
Date: Thu, 16 Apr 2009 12:50:50 -0700
Subject: Comment kscoat SNF 2009-04-10 15:53:09: Cleaned KS & Bake Plates
Message-ID: <mailman.90.1356281990.4047.kscoat-pcs@snf.stanford.edu>




From lindaohara at snf.stanford.edu  Thu Apr 16 12:50:56 2009
From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu)
Date: Thu, 16 Apr 2009 12:50:56 -0700
Subject: Comment kscoat SNF 2009-04-03 15:31:54: Cleaned KS 
Message-ID: <mailman.91.1356281990.4047.kscoat-pcs@snf.stanford.edu>




From lindaohara at snf.stanford.edu  Thu Apr 16 12:51:00 2009
From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu)
Date: Thu, 16 Apr 2009 12:51:00 -0700
Subject: Comment kscoat SNF 2009-03-27 14:52:13: Cleaned KS and bake modules
Message-ID: <mailman.92.1356281990.4047.kscoat-pcs@snf.stanford.edu>




From lindaohara at snf.stanford.edu  Fri Apr 17 15:37:34 2009
From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu)
Date: Fri, 17 Apr 2009 15:37:34 -0700
Subject: Comment kscoat SNF 2009-04-17 15:37:33: cleaned KS and bake plates
Message-ID: <mailman.93.1356281990.4047.kscoat-pcs@snf.stanford.edu>




From lindaohara at snf.stanford.edu  Fri Apr 17 15:37:44 2009
From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu)
Date: Fri, 17 Apr 2009 15:37:44 -0700
Subject: Comment kscoat SNF 2009-04-17 15:37:33: cleaned KS and bake plates
Message-ID: <mailman.94.1356281990.4047.kscoat-pcs@snf.stanford.edu>




From gsosa at snf.stanford.edu  Thu Apr 23 16:03:49 2009
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Thu, 23 Apr 2009 16:03:49 -0700
Subject: Comment kscoat SNF 2009-04-23 16:03:48: System Cleaned 4/23/09
Message-ID: <mailman.95.1356281990.4047.kscoat-pcs@snf.stanford.edu>

System coater module cleaned by Linda O.



From gsosa at snf.stanford.edu  Tue Apr 28 08:28:56 2009
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Tue, 28 Apr 2009 08:28:56 -0700
Subject: Comment kscoat SNF 2009-04-28 08:28:56: 955-7 Thickness
Message-ID: <mailman.96.1356281990.4047.kscoat-pcs@snf.stanford.edu>

Checked resist thickness for 955-7 resist. Target 0.7 microns. Measured 5 points: Ave 6931 Angstroms, Std Dev- 12 Angstroms.