From lindaohara at snf.stanford.edu  Thu Dec  3 09:01:24 2009
From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu)
Date: Thu, 3 Dec 2009 09:01:24 -0800
Subject: Comment kscoat SNF 2009-12-03 09:01:24: ASML DEMO
Message-ID: <mailman.162.1356281991.4047.kscoat-pcs@snf.stanford.edu>




From lindaohara at snf.stanford.edu  Fri Dec  4 08:25:29 2009
From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu)
Date: Fri, 4 Dec 2009 08:25:29 -0800
Subject: Comment kscoat SNF 2009-12-03 09:01:24: ASML DEMO
Message-ID: <mailman.163.1356281991.4047.kscoat-pcs@snf.stanford.edu>

for wrong system



From lindaohara at snf.stanford.edu  Fri Dec  4 15:11:27 2009
From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu)
Date: Fri, 4 Dec 2009 15:11:27 -0800
Subject: Comment kscoat SNF 2009-11-13 15:05:43: Cleaned KS Coater Cup & System
Message-ID: <mailman.164.1356281991.4047.kscoat-pcs@snf.stanford.edu>

archive



From lindaohara at snf.stanford.edu  Fri Dec  4 15:11:58 2009
From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu)
Date: Fri, 4 Dec 2009 15:11:58 -0800
Subject: Comment kscoat SNF 2009-12-04 15:11:57: Cleaned KS System
Message-ID: <mailman.165.1356281991.4047.kscoat-pcs@snf.stanford.edu>




From lindaohara at snf.stanford.edu  Fri Dec 18 11:58:22 2009
From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu)
Date: Fri, 18 Dec 2009 11:58:22 -0800
Subject: Comment kscoat SNF 2009-12-18 11:58:21: KS Shutdown
Message-ID: <mailman.166.1356281991.4047.kscoat-pcs@snf.stanford.edu>

Cleaned Coat Cup, Bake, & System. Refilled HMDS & EBR. Flushed
Dev and filled with water. Shutdown system