Comment kscoat SNF 2009-12-18 11:58:21: KS Shutdown

lindaohara at snf.stanford.edu lindaohara at snf.stanford.edu
Fri Dec 18 11:58:22 PST 2009


Cleaned Coat Cup, Bake, & System. Refilled HMDS & EBR. Flushed
Dev and filled with water. Shutdown system




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