From shott at snf.stanford.edu Tue Jan 20 07:26:44 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:26:44 -0800 Subject: Comment kscoat SNF 2007-12-08 19:32:10: Power outage Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:26:49 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:26:49 -0800 Subject: Comment kscoat SNF 2008-03-11 09:28:00: Coater is up. Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:26:54 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:26:54 -0800 Subject: Problem kscoat SNF 2008-05-20 09:36:56: smells Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:27:00 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:27:00 -0800 Subject: Problem kscoat SNF 2008-05-30 16:07:56: Spin Coater waste can problem Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:27:05 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:27:05 -0800 Subject: Problem kscoat SNF 2008-06-05 09:16:52: Coating wafers and can smell resist. Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:27:11 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:27:11 -0800 Subject: Problem kscoat SNF 2008-10-01 09:15:29: smell the resist while spinning Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:27:17 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:27:17 -0800 Subject: Comment kscoat SNF 2008-10-17 10:43:48: Scale functional and calibrated. Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:27:26 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:27:26 -0800 Subject: Problem kscoat SNF 2008-10-23 11:47:20: Backside wetting on developer. Message-ID: To the archives ... From shott at snf.stanford.edu Tue Jan 20 07:27:34 2009 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 20 Jan 2009 07:27:34 -0800 Subject: Comment kscoat SNF 2008-12-09 16:33:21: Pump Chiller breaker off Message-ID: To the archives ... From lindaohara at snf.stanford.edu Wed Jan 21 09:47:19 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 21 Jan 2009 09:47:19 -0800 Subject: Problem kscoat SNF 2009-01-21 09:47:18: Developer Prob Message-ID: wet under wafer after develop