From lindaohara at snf.stanford.edu  Thu Mar 12 15:00:29 2009
From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu)
Date: Thu, 12 Mar 2009 15:00:29 -0700
Subject: Problem kscoat SNF 2009-03-12 15:00:28: EBR leak
Message-ID: <mailman.83.1356281990.4047.kscoat-pcs@snf.stanford.edu>

EBR leak on arm



From pding at snf.stanford.edu  Wed Mar 18 09:29:32 2009
From: pding at snf.stanford.edu (pding at snf.stanford.edu)
Date: Wed, 18 Mar 2009 09:29:32 -0700
Subject: Shutdown kscoat SNF 2009-03-18 09:29:32: Coater error
Message-ID: <mailman.84.1356281990.4047.kscoat-pcs@snf.stanford.edu>

Coater recipe will not start.  Giving error on waste level.



From gsosa at snf.stanford.edu  Wed Mar 18 13:17:48 2009
From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu)
Date: Wed, 18 Mar 2009 13:17:48 -0700
Subject: Shutdown kscoat SNF 2009-03-18 09:29:32: Coater error
Message-ID: <mailman.85.1356281990.4047.kscoat-pcs@snf.stanford.edu>

Checked and put waste scale of-line. Tested by processing 3 wafers through the coater. All OK.



From lindaohara at snf.stanford.edu  Fri Mar 27 14:52:14 2009
From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu)
Date: Fri, 27 Mar 2009 14:52:14 -0700
Subject: Comment kscoat SNF 2009-03-27 14:52:13: Cleaned KS and bake modules
Message-ID: <mailman.86.1356281990.4047.kscoat-pcs@snf.stanford.edu>