From lindaohara at snf.stanford.edu Fri May 1 14:56:47 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 1 May 2009 14:56:47 -0700 Subject: Comment kscoat SNF 2009-05-01 14:56:47: Cleaned KS Coat Message-ID: From lindaohara at snf.stanford.edu Fri May 8 14:55:00 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 8 May 2009 14:55:00 -0700 Subject: Comment kscoat SNF 2009-05-08 14:54:59: Cleaned KS and Hot Plates Message-ID: From lindaohara at snf.stanford.edu Fri May 8 14:55:21 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 8 May 2009 14:55:21 -0700 Subject: Comment kscoat SNF 2009-05-01 14:56:47: Cleaned KS Coat Message-ID: done From lindaohara at snf.stanford.edu Fri May 8 14:55:32 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 8 May 2009 14:55:32 -0700 Subject: Comment kscoat SNF 2009-05-08 14:54:59: Cleaned KS and Hot Plates Message-ID: done From mahnaz at snf.stanford.edu Tue May 12 11:31:01 2009 From: mahnaz at snf.stanford.edu (mahnaz at snf.stanford.edu) Date: Tue, 12 May 2009 11:31:01 -0700 Subject: Problem kscoat SNF 2009-05-12 11:31:00: cool plate is not working Message-ID: From gsosa at snf.stanford.edu Tue May 12 15:50:25 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 12 May 2009 15:50:25 -0700 Subject: Problem kscoat SNF 2009-05-12 11:31:00: cool plate is not working Message-ID: Reset the circuit breaker for the chiller. Removed stranded wafers from chill plate, hotplate and vapor prime. Did full shutdown and startup of system. Tested operation. OK From gsosa at snf.stanford.edu Thu May 14 16:16:40 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Thu, 14 May 2009 16:16:40 -0700 Subject: Problem kscoat SNF 2009-05-14 16:16:40: E Zero shift Message-ID: Large shift in E0 over past 2 weeks. E0 shifted from ~50mj's to less than 40( off scale). Did partitioning tests. 1st test: PEB is Suss tool and develop in SVG- OK at 49 mj's. 2nd test PEB in SVG Dev and develop in Suss tool- Bad <40 mj;s (off scale). Definite problem in developer module.Verified temperature on recirculator for developer temperature control: OK at 21 deg C measured with thermometer. Disabled and vented developer canister, processed one wafer with standard recipe except with manual pour of fresh developer. Result OK at 49 mj's. Advise ASML to drain remaining chemical, flush dispense system with DI water and refill with fresh chemical. From lindaohara at snf.stanford.edu Fri May 15 15:59:28 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 15 May 2009 15:59:28 -0700 Subject: Problem kscoat SNF 2009-05-15 15:59:27: Developer not communicating Message-ID: From lindaohara at snf.stanford.edu Thu May 21 00:30:34 2009 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 21 May 2009 00:30:34 -0700 Subject: Problem kscoat SNF 2009-05-21 00:30:33: No Developer Message-ID: No developer. old developer flushed out by Gary. He will notify when there is develper in the Karl Suss. Use the SVG Develop if you need to. From gsosa at snf.stanford.edu Fri May 29 13:01:30 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 29 May 2009 13:01:30 -0700 Subject: Problem kscoat SNF 2009-05-14 16:16:40: E Zero shift Message-ID: Flushed the entire dispense system with 4 gallons of DI water. Purged water from system. Wiped down inside of canister to remove residual water. Added 2 gallons of developer and primed up the dispense system. Exposed and developed 2 Dose to Clear wafers. Results were 52 and 53 mj. System back to normal. Also activated the canister empty sensor through software. From gsosa at snf.stanford.edu Fri May 29 13:01:38 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 29 May 2009 13:01:38 -0700 Subject: Problem kscoat SNF 2009-05-21 00:30:33: No Developer Message-ID: Flushed the entire dispense system with 4 gallons of DI water. Purged water from system. Wiped down inside of canister to remove residual water. Added 2 gallons of developer and primed up the dispense system. Exposed and developed 2 Dose to Clear wafers. Results were 52 and 53 mj. System back to normal. Also activated the canister empty sensor through software. From gsosa at snf.stanford.edu Fri May 29 13:02:04 2009 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Fri, 29 May 2009 13:02:04 -0700 Subject: Problem kscoat SNF 2009-05-15 15:59:27: Developer not communicating Message-ID: Reset developer module