Problem kscoat SNF 2009-05-12 11:31:00: cool plate is not working

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Tue May 12 15:50:25 PDT 2009


Reset  the circuit breaker for the chiller. Removed stranded wafers from chill plate, hotplate and vapor prime. Did full shutdown and startup of system. Tested operation. OK




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