Problem kscoat SNF 2009-05-14 16:16:40: E Zero shift

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri May 29 13:01:30 PDT 2009


Flushed the entire dispense system with 4 gallons of DI water. Purged water from system. Wiped down inside of canister to remove residual water. Added 2 gallons of developer and primed up the dispense system. Exposed and developed 2 Dose to Clear wafers. Results were 52 and 53 mj. System back to normal. Also activated the canister empty sensor through software. 




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