Problem kscoat SNF 2009-05-21 00:30:33: No Developer

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Fri May 29 13:01:38 PDT 2009


Flushed the entire dispense system with 4 gallons of DI water. Purged water from system. Wiped down inside of canister to remove residual water. Added 2 gallons of developer and primed up the dispense system. Exposed and developed 2 Dose to Clear wafers. Results were 52 and 53 mj. System back to normal. Also activated the canister empty sensor through software. 




More information about the kscoat-pcs mailing list