From lindaohara at snf.stanford.edu  Wed Nov  4 11:53:02 2009
From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu)
Date: Wed, 4 Nov 2009 11:53:02 -0800
Subject: Comment kscoat SNF 2009-11-04 11:53:01: Testing Centering Station
Message-ID: <mailman.152.1356281991.4047.kscoat-pcs@snf.stanford.edu>

Running wafers to test centering station after clean, lubrication, & adjustment.



From lindaohara at snf.stanford.edu  Thu Nov  5 11:59:56 2009
From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu)
Date: Thu, 5 Nov 2009 11:59:56 -0800
Subject: Comment kscoat SNF 2009-11-04 11:53:01: Testing Centering Station
Message-ID: <mailman.153.1356281991.4047.kscoat-pcs@snf.stanford.edu>

Test ok, cleaned, lubricated, & adjustment by Gary Sosa



From lindaohara at snf.stanford.edu  Fri Nov  6 14:44:06 2009
From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu)
Date: Fri, 6 Nov 2009 14:44:06 -0800
Subject: Comment kscoat SNF 2009-10-23 15:23:19: Cleaned Coat Cup, Bake, & System
Message-ID: <mailman.154.1356281991.4047.kscoat-pcs@snf.stanford.edu>




From lindaohara at snf.stanford.edu  Fri Nov  6 14:44:46 2009
From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu)
Date: Fri, 6 Nov 2009 14:44:46 -0800
Subject: Comment kscoat SNF 2009-11-06 14:44:45: Cleaned Coater Cup, Bake, and System
Message-ID: <mailman.155.1356281991.4047.kscoat-pcs@snf.stanford.edu>




From lindaohara at snf.stanford.edu  Fri Nov 13 15:05:44 2009
From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu)
Date: Fri, 13 Nov 2009 15:05:44 -0800
Subject: Comment kscoat SNF 2009-11-13 15:05:43: Cleaned KS Coater Cup & System
Message-ID: <mailman.156.1356281991.4047.kscoat-pcs@snf.stanford.edu>




From lindaohara at snf.stanford.edu  Fri Nov 13 15:06:05 2009
From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu)
Date: Fri, 13 Nov 2009 15:06:05 -0800
Subject: Comment kscoat SNF 2009-10-30 14:11:57: Cleaned Coater Cup, Bake, & System 10/30
Message-ID: <mailman.157.1356281991.4047.kscoat-pcs@snf.stanford.edu>

archive



From lindaohara at snf.stanford.edu  Tue Nov 17 13:41:50 2009
From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu)
Date: Tue, 17 Nov 2009 13:41:50 -0800
Subject: Problem kscoat SNF 2009-11-17 13:41:49: KS stabilizing
Message-ID: <mailman.158.1356281991.4047.kscoat-pcs@snf.stanford.edu>

Resist thickness out of spec, let it stabilize and then test again



From lindaohara at snf.stanford.edu  Wed Nov 18 10:54:19 2009
From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu)
Date: Wed, 18 Nov 2009 10:54:19 -0800
Subject: Problem kscoat SNF 2009-11-17 13:41:49: KS stabilizing
Message-ID: <mailman.159.1356281991.4047.kscoat-pcs@snf.stanford.edu>

Resist Thk in spec 7000 Angstroms 3650RPM



From lindaohara at snf.stanford.edu  Fri Nov 20 14:59:48 2009
From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu)
Date: Fri, 20 Nov 2009 14:59:48 -0800
Subject: Comment kscoat SNF 2009-11-06 14:44:45: Cleaned Coater Cup, Bake, and System
Message-ID: <mailman.160.1356281991.4047.kscoat-pcs@snf.stanford.edu>




From lindaohara at snf.stanford.edu  Fri Nov 20 15:00:58 2009
From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu)
Date: Fri, 20 Nov 2009 15:00:58 -0800
Subject: Comment kscoat SNF 2009-11-20 15:00:58: Cleaned KS Coater Cup, Bake, & System 11/20
Message-ID: <mailman.161.1356281991.4047.kscoat-pcs@snf.stanford.edu>