Problem kscoat SNF 2009-11-17 13:41:49: KS stabilizing
lindaohara at snf.stanford.edu
lindaohara at snf.stanford.edu
Wed Nov 18 10:54:19 PST 2009
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Problem kscoat SNF 2009-11-17 13:41:49: KS stabilizing
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Comment kscoat SNF 2009-11-20 15:00:58: Cleaned KS Coater Cup, Bake, & System 11/20
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Resist Thk in spec 7000 Angstroms 3650RPM
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Problem kscoat SNF 2009-11-17 13:41:49: KS stabilizing
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Comment kscoat SNF 2009-11-20 15:00:58: Cleaned KS Coater Cup, Bake, & System 11/20
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