From lindaohara at snf.stanford.edu Fri Sep 3 13:43:23 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 3 Sep 2010 13:43:23 -0700 Subject: Comment kscoat SNF 2010-08-20 14:13:23: Cleaned Ctr Cup, Bake, & System Message-ID: archive From lindaohara at snf.stanford.edu Fri Sep 3 13:43:33 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 3 Sep 2010 13:43:33 -0700 Subject: Comment kscoat SNF 2010-09-03 13:43:33: Cleaned Ctr Cup, Bake, & System Message-ID: From gsosa at snf.stanford.edu Tue Sep 7 10:06:49 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Tue, 7 Sep 2010 10:06:49 -0700 Subject: Shutdown kscoat SNF 2010-09-07 10:06:48: Vendor PM Message-ID: Vendor is doing a system PM From lindaohara at snf.stanford.edu Fri Sep 10 13:31:58 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 10 Sep 2010 13:31:58 -0700 Subject: Comment kscoat SNF 2010-09-10 13:31:57: Power Supply bad Message-ID: From gsosa at snf.stanford.edu Mon Sep 13 15:45:47 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 13 Sep 2010 15:45:47 -0700 Subject: Shutdown kscoat SNF 2010-09-07 10:06:48: Vendor PM Message-ID: Vendor completed PM. Vendor checked and replaced the Air Gripper on the centering station to fix intermittant clamping problem. Checked and retought robot points for the various modules and the load station. Optimized wafer handling for 200mm wafers. System powering down and erratic interlock errors. Problem diagnosed by FSE and tech support as bad 24 VDC power supply. Repaced the 24 VDC power supply . Powered up and stabilized system. Hardware initialization OK. Cycled wafers through full coat and full deveop path with 200mm wafers. All wafer handling appears to be OK. Needs further testing with ASML. From gsosa at snf.stanford.edu Mon Sep 13 15:45:54 2010 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Mon, 13 Sep 2010 15:45:54 -0700 Subject: Comment kscoat SNF 2010-09-10 13:31:57: Power Supply bad Message-ID: Vendor completed PM. Vendor checked and replaced the Air Gripper on the centering station to fix intermittant clamping problem. Checked and retought robot points for the various modules and the load station. Optimized wafer handling for 200mm wafers. System powering down and erratic interlock errors. Problem diagnosed by FSE and tech support as bad 24 VDC power supply. Repaced the 24 VDC power supply . Powered up and stabilized system. Hardware initialization OK. Cycled wafers through full coat and full deveop path with 200mm wafers. All wafer handling appears to be OK. Needs further testing with ASML. From lindaohara at snf.stanford.edu Fri Sep 24 15:27:25 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 24 Sep 2010 15:27:25 -0700 Subject: Comment kscoat SNF 2010-09-24 15:27:25: Cleaned Ctr Cup, Bake, & System Message-ID: From lindaohara at snf.stanford.edu Fri Sep 24 15:27:39 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 24 Sep 2010 15:27:39 -0700 Subject: Comment kscoat SNF 2010-08-27 14:37:20: Cleaned Ctr Cup& System Message-ID: archive