From lindaohara at snf.stanford.edu Fri Nov 4 14:46:05 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 4 Nov 2011 14:46:05 -0700 Subject: Comment kscoat SNF 2011-10-21 15:22:35: Clean Ctr Cup & System Message-ID: archive From lindaohara at snf.stanford.edu Fri Nov 4 14:46:29 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 4 Nov 2011 14:46:29 -0700 Subject: Comment kscoat SNF 2011-11-04 14:46:28: Clean Ctr Cup, Bake, & System Message-ID: From lindaohara at snf.stanford.edu Thu Nov 10 11:29:52 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 10 Nov 2011 11:29:52 -0800 Subject: Comment kscoat SNF 2011-10-28 15:02:36: Cleaned Ctr Cup & System Message-ID: archive From lindaohara at snf.stanford.edu Thu Nov 10 11:30:00 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Thu, 10 Nov 2011 11:30:00 -0800 Subject: Comment kscoat SNF 2011-11-10 11:29:59: Cleaned Ctr Cup & System Message-ID: From lindaohara at snf.stanford.edu Fri Nov 18 11:04:50 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 18 Nov 2011 11:04:50 -0800 Subject: Problem kscoat SNF 2011-11-18 11:04:49: Left Cassette Message-ID: Robot not putting wafer back in cassette. Will try to have Karl Suss FS calibrate robot after shutdown. From lindaohara at snf.stanford.edu Fri Nov 18 14:03:13 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 18 Nov 2011 14:03:13 -0800 Subject: Comment kscoat SNF 2011-11-04 14:46:28: Clean Ctr Cup, Bake, & System Message-ID: archive From lindaohara at snf.stanford.edu Fri Nov 18 14:03:30 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 18 Nov 2011 14:03:30 -0800 Subject: Comment kscoat SNF 2011-11-18 14:03:30: Cleaned Ctr Cup & System Message-ID: From lindaohara at snf.stanford.edu Wed Nov 23 09:18:41 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 23 Nov 2011 09:18:41 -0800 Subject: Problem kscoat SNF 2011-11-23 09:18:41: Both Cassettes Prob Message-ID: Intermittent prob on touching wafer when loading and leaving wafer on robot when unloading. From lindaohara at snf.stanford.edu Wed Nov 23 09:19:32 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Wed, 23 Nov 2011 09:19:32 -0800 Subject: Problem kscoat SNF 2011-11-23 09:19:31: Cool Plate door Open Message-ID: Intermittent prob on Cool Plate door opening and closing