From lindaohara at snf.stanford.edu Fri Oct 7 14:57:28 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 7 Oct 2011 14:57:28 -0700 Subject: Comment kscoat SNF 2011-09-30 14:12:03: Cleaned Ctr Cup & System Message-ID: archive From lindaohara at snf.stanford.edu Fri Oct 7 14:58:14 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 7 Oct 2011 14:58:14 -0700 Subject: Comment kscoat SNF 2011-10-07 14:58:13: Clean Ctr Cup, Bake, and System Message-ID: From gsosa at snf.stanford.edu Wed Oct 12 08:16:40 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 12 Oct 2011 08:16:40 -0700 Subject: Shutdown kscoat SNF 2011-10-12 08:16:39: Nitrogen leak 10/12 Message-ID: There is a broken quick connect fitting inside of the Bake module at the distribution panel. From gsosa at snf.stanford.edu Wed Oct 12 15:13:51 2011 From: gsosa at snf.stanford.edu (gsosa at snf.stanford.edu) Date: Wed, 12 Oct 2011 15:13:51 -0700 Subject: Shutdown kscoat SNF 2011-10-12 08:16:39: Nitrogen leak 10/12 Message-ID: Replaced the broken fitting with a fitting borrowed from the blank module. Turned on N2 pressure and checked for leaks-All OK. Powered up and initialized the tool. All OK except for Bakeplate #1. Tested operation with standard process- All OK. From lindaohara at snf.stanford.edu Fri Oct 14 15:27:51 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 14 Oct 2011 15:27:51 -0700 Subject: Comment kscoat SNF 2011-09-23 14:50:42: Cleaned Ctr Cup & System Message-ID: From lindaohara at snf.stanford.edu Fri Oct 14 15:28:03 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 14 Oct 2011 15:28:03 -0700 Subject: Comment kscoat SNF 2011-10-14 15:28:02: Cleaned Ctr Cup & System Message-ID: From vilanova at snf.stanford.edu Tue Oct 18 07:45:05 2011 From: vilanova at snf.stanford.edu (vilanova at snf.stanford.edu) Date: Tue, 18 Oct 2011 07:45:05 -0700 Subject: Comment kscoat SNF 2011-09-29 09:04:24: EBR low Message-ID: Refilled EBR Canister and also refilled the Developer Canister. From lindaohara at snf.stanford.edu Fri Oct 21 15:22:04 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 21 Oct 2011 15:22:04 -0700 Subject: Comment kscoat SNF 2011-10-07 14:58:13: Clean Ctr Cup, Bake, and System Message-ID: archive From lindaohara at snf.stanford.edu Fri Oct 21 15:22:35 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 21 Oct 2011 15:22:35 -0700 Subject: Comment kscoat SNF 2011-10-21 15:22:35: Clean Ctr Cup & System Message-ID: From lindaohara at snf.stanford.edu Fri Oct 28 15:02:28 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 28 Oct 2011 15:02:28 -0700 Subject: Comment kscoat SNF 2011-10-14 15:28:02: Cleaned Ctr Cup & System Message-ID: archive From lindaohara at snf.stanford.edu Fri Oct 28 15:02:36 2011 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 28 Oct 2011 15:02:36 -0700 Subject: Comment kscoat SNF 2011-10-28 15:02:36: Cleaned Ctr Cup & System Message-ID: