Shutdown kscoat SNF 2011-10-12 08:16:39: Nitrogen leak 10/12

gsosa at snf.stanford.edu gsosa at snf.stanford.edu
Wed Oct 12 15:13:51 PDT 2011


Replaced the broken fitting with a fitting borrowed from the blank module. Turned on N2 pressure and checked for leaks-All OK. Powered up and initialized the tool. All OK except for Bakeplate #1. Tested operation with standard process- All OK.




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